Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California
RESULTS AND DISCUSSION Via Resistance Calculation According to the wiring diagram shown in Fig. ... The single vias were fabricated in a three layer Pi/metal structure which had been RIEed in the CF4/O2 gas and was believed to have aanbsp;...
| Title | : | Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California |
| Author | : | |
| Publisher | : | International Society of Hybrid - 1992 |
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