Photo-initiated deposition and etching of materials relevant to semiconductor devices
a#39;Spectra- Physics data sheet. b Peak power. 800i i i i i | 1 ra i a. References 47 667 217 678 b 480 d e 481 b, 482 S b, 483 667 667 678 670 670 670 417 484 654 Pulse duration 1ms ao 00 00 12 ns 10-20 ns 15 ns 27 ps 80 ps alt;100ps 85 ps anbsp;...
| Title | : | Photo-initiated deposition and etching of materials relevant to semiconductor devices |
| Author | : | J. Haigh, M. R. Aylett |
| Publisher | : | - 1988 |
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