Microscopy of Semiconducting Materials 2003

Microscopy of Semiconducting Materials 2003

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Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.After preparation the specimens were transferred to the microscope in a vacuum box to protect against oxidation. High resolution microscopy and electron diffraction were done with an TECNAl F20 ST. EELS measurements were ... substrate and film. At the edges of the defect region lines can be identified with an angle ofanbsp;...

Title:Microscopy of Semiconducting Materials 2003
Author: A.G Cullis, P.A. Midgley
Publisher:CRC Press - 2004-04-20

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